APPARATUS FOR IMMERSION-BASED PREPARATION OF PEROVSKITE THIN FILM, USE METHOD AND APPLICATION THEREOF

摘要

The invention relates to an apparatus for immersion-based preparation of a perovskite thin film, including a sealed cavity (1). The sealed cavity (1) is internally provided with at least one semi-enclosed reactor device (2) therein, the semi-enclosed reactor device (2) includes a lower heating and sublimation device (3) and an upper heating station (4), a container (5) is provided at the top of the lower heating and sublimation device, the container (5) contains a reactant precursor, a substrate frame (6) is provided directly above the container (5), the substrate frame (6) covers an opening of the container (5), a substrate frame support platform (7) is provided at a side surface of the container (5), the substrate frame (6) is disposed on the substrate frame support platform (7), a substrate (8) to be deposited is provided at a lower bottom surface of the substrate frame (6), a surface to be deposited of the substrate (8) directly faces the reactant precursor in the container (5), and the upper heating station (4) is disposed on the substrate frame (6) to heat the substrate (8). The invention further discloses a method for preparing a perovskite solar cell by using the apparatus for immersion-based preparation of a perovskite thin film. Crystal growth of the thin film can be controlled in the preparation process, and the film formation quality, and uniformity and repeatability are improved.