It is in making the measurement of the bump height simple. An optical sensor having a light source and a light receiving element, and irradiating light from the light source on a substrate having a seed layer, a resist layer formed on the seed layer, and a bump formed in an opening of the resist layer, and through the resist layer An optical sensor that detects the reflected light reflected from the seed layer and the reflected light reflected from the bump by the light-receiving element, and based on the reflected light from the seed layer and the reflected light from the bump, the A bump height measuring apparatus comprising a control device for calculating the height of a bump and correcting the height of the bump by subtracting an error due to the refractive index of the resist layer from the height of the bump calculated based on the reflected light.
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