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SCANNING METHODS FOR CREATING TIME-RESOLVED EMISSION IMAGES OF INTEGRATED CIRCUITS USING A SINGLE-POINT SINGLE-PHOTON DETECTOR AND A SCANNING SYSTEM
SCANNING METHODS FOR CREATING TIME-RESOLVED EMISSION IMAGES OF INTEGRATED CIRCUITS USING A SINGLE-POINT SINGLE-PHOTON DETECTOR AND A SCANNING SYSTEM
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机译:使用单点单光子检测器和扫描系统扫描用于创建集成电路的时间分辨发射图像的方法
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摘要
A Scanning Time-Resolved Emission (S-TRE) microscope or system includes an optical system configured to collect light from emissions of light generated by a device under test (DUT). A scanning system is configured to permit the emissions of light to be collected from positions across the DUT in accordance with a scan pattern. A timing photodetector is configured to detect a single photon or photons of the emissions of light from the particular positions across the DUT such that the emissions of light are correlated to the positions to create a time-dependent map of the emissions of light across the DUT. Updating the time-dependent map of the emissions based on variable dwell times at respective locations of the DUT.
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