METHOD AND APPARATUS FOR CREATING TIME-RESOLVED EMISSION IMAGES OF INTEGRATED CIRCUITS USING A SINGLE-POINT SINGLE-PHOTON DETECTOR AND A SCANNING SYSTEM

摘要

A Scanning Time-Resolved Emission (S-TRE) microscope or system includes an optical system (54) configured to collect light from emissions of light generated by a device under test (DUT). A scanning system (20) is configured to permit the emissions of light to be collected from positions across the DUT in accordance with a scan pattern. A timing photodetector (42) is configured to detect a single photon or photons of the emissions of light from the particular positions across the DUT such that the emissions of light are correlated to the positions to create a time-dependent map of the emissions of light across the DUT.