The microlens manufacturing method includes an etching process and a surface treatment process. In the etching process, the first organic film is etched using the plasma of the first processing gas with the second organic film as a mask for the object to be processed in which the second organic film having a lens shape is formed on the first organic film formed on the substrate. As a result, the lens shape of the second organic layer is transferred to the first organic layer to form a microlens on the first organic layer. In the surface treatment process, the surface of the microlens formed in the first organic film is treated to be smooth.
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