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MANUFACTURE OF MICROLENS, MICROLENS MANUFACTURED BY THE MANUFACTURING METHOD, OPTICAL DEVICE USING THE MICROLENS AND SLIDER OF THE OPTICAL DEVICE
MANUFACTURE OF MICROLENS, MICROLENS MANUFACTURED BY THE MANUFACTURING METHOD, OPTICAL DEVICE USING THE MICROLENS AND SLIDER OF THE OPTICAL DEVICE
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机译:微缩分子的制造,通过制造方法制造的微缩分子,使用微缩分子的光学器件和光学器件的滑块
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摘要
PROBLEM TO BE SOLVED: To provide a method for manufacture of a microlens capable of manufacturing easily the high NA microlens. ;SOLUTION: The method for manufacture of a microlens contains a process [fig.1 (C)] for manufacturing the first and second substrates wherein a microlens 105 is respectively formed at a position deeper than that of the substrate surface at least on one side, and a procee [fig.1 (E) ] for pasting together both faces wherein each microlens 105 of the first or second substrate 102 is formed by opposing them to each other.;COPYRIGHT: (C)2000,JPO
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