Apparatus for producing best of silicon by means of thermal decomposition or thermal reduction of a gaseous, silicon compounds of fresh gas mixture containing.

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  机译： 一种通过热分解气态硅化合物在蓝宝石上在位置上产生单晶硅层的方法

• 4. process for the manufacture of preferably silicon layers for semiconductor devices by thermal decomposition of gaseous compounds and separation of semiconductor material on a heated, preferably silicon carrier [P] . AT245042B . 1966-02-10

  机译： 通过气态化合物的热分解并在加热的，优选为硅的载体上分离半导体材料来制造用于半导体器件的优选硅层的方法

• 5. A method for the production of ultra-pure silicon by thermal decomposition of gaseous silicon compounds [P] . 德国专利： DE1128412B . 1962-04-26

  机译： 通过气态硅化合物的热分解生产超纯硅的方法

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