device for metering the vakuumkinematographie in an electron microscope

• 1. 一种用于扫描电子显微镜中真空运动平台的双轴联动结构 [P] . 中国专利： CN112530772A . 2021-03-19
• 2. 一种用于扫描电子显微镜中的真空四轴运动平台结构 [P] . 中国专利： CN112362680A . 2021-02-12
• 3. EXPOSURE METER DEVICE FOR ELECTRON MICROSCOPE [P] . 日本专利： JPS62290055A . 1987-12-16

  机译： 电子显微镜曝光仪表

• 4. korpuskularstrahlgeraet, especially electron microscope with a device for metering [P] . 德国专利： DE1514578B2 . 1970-10-29

  机译： korpuskularstrahlgeraet，特别是带有计量装置的电子显微镜

• 5. korpuskularstrahlgeraet, especially electron microscope with a device for metering [P] . 德国专利： DE000001514578A . 1969-05-22

  机译： korpuskularstrahlgeraet，特别是带有计量装置的电子显微镜

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• 7. Semiconductor Measurement Technology:Notes on SEM (Scanning Electron Microscope) Examination of Microelectronic Devices. [R] . devaney,john r. leedy, k. o. 1977

• 1. Hitachi Electronic Devices拓展Camstar Electronics Suite TM的应用以管理其迅速增长的产能 [J] . . 电子工业专用设备 . 2008,第010期
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