ELECTRON PROBE MICROANALYZER HAVING A PLURALITY OF X-RAY SPECTROMETERS POSITIONED TO MINIMIZE X-RAY DEFOCUSSING DURING SPECIMEN SCANNING

摘要

1,148,646. X-ray micro-analyser. CAMBRIDGE INSTRUMENT CO. Ltd. 13 Feb., 1968 [16 Feb., 1967], No. 7462/67. Heading H5R. In a micro-analyser, a finely focused electron beam impinges on the surface of a specimen, the X-rays so produced are detected by at least 3 separate crystal or grating spectrometers, the electron beam is scanned along a datum line on the specimen, and spectrometers are arranged around the specimen such that the plane of each spectrometer, that is the plane defined by the directions of the incident and reflected X-ray beams, contains a line which is perpendicular both to the datum line and to the path of the rays incident on that spectrometer. Preferably the spectrometers are arranged symmetrically on each side of the plane containing the axis of the electron beam and the datum line. Two or more of the spectrometers may be arranged such that they have a common privileged plane, that is a plane perpendicular to the spectrometer plane and containing the direction of the incident beam. The spectrometers may have the same angle between the specimen surface and the incident ray. The spectrometers may also be arranged symmetrically about a plane that contains the mid-point of the line scanned on the surface of the specimen by the electron beam and is perpendicular to the datum line. During the analysis the specimen itself may be moved in a direction perpendicular to the datum line.