Electron probe microanalyzer having wavelength-dispersive x-ray spectrometer and energy-dispersive x-ray spectrometer

摘要

An electron probe microanalyzer equipped with a wavelength- dispersive x-ray spectrometer and also with an energy-dispersive x-ray spectrometer. X-rays emanating from the same sample region are detected by these two spectrometers, and spectra are created from the detected x- rays. Cursors which can be moved at will are superimposed on the spectra. One of the cursors is moved in relation to the other. That is, when one cursor is moved into the position of a desired wavelength or energy, the other is moved into the position of the corresponding energy or wavelength. The use of the cursors enables one to precisely and easily find the existence of a certain element in the sample region from the spectra obtained by the two x-ray spectrometers.