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study on process of liquid phase epitaxial semiconducting
study on process of liquid phase epitaxial semiconducting
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机译:液相外延半导体工艺研究
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摘要
A process for selectively growing semiconductor material, particularly Group III-V semiconductor compounds, on semi-insulating substrates with uniform dissolution and regrowth in selected regions is disclosed. The fabrication of substantially planar monolithic semiconductor devices in a semi-insulating substrate and, in particular, light-emitting devices are also disclosed.
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