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study on process of liquid phase epitaxial semiconducting

机译:液相外延半导体工艺研究

摘要

A process for selectively growing semiconductor material, particularly Group III-V semiconductor compounds, on semi-insulating substrates with uniform dissolution and regrowth in selected regions is disclosed. The fabrication of substantially planar monolithic semiconductor devices in a semi-insulating substrate and, in particular, light-emitting devices are also disclosed.
机译:公开了一种用于在半绝缘衬底上选择性地生长半导体材料,特别是III-V族半导体化合物的方法,其在选定区域中具有均匀的溶解和再生长。还公开了在半绝缘衬底中制造基本上平面的单片半导体器件,尤其是发光器件。

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