首页>
外国专利>
METAL-OXIDE-METAL, THIN-FILM CAPACITORS AND METHOD OF MAKING SAME
METAL-OXIDE-METAL, THIN-FILM CAPACITORS AND METHOD OF MAKING SAME
展开▼
机译:金属氧化物,薄膜电容器及其制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
In the manufacture of a metal-oxide-metal (MOM) thin-film capacitor, the layer of dielectric material, such as silicon dioxide, is deposited, by thermal decomposition of a silicon compound, over a conductive ground plate; and the Q factor (or quality factor) of the capacitor is enhanced and the dissipation factor of the silicon dioxide is reduced by low-temperature densification of the silicon dioxide.
展开▼