Tantalum pentoxide dielectric for thin film techniques - produced using pure aq ammonia soln as electrolyte in anodic oxidn

摘要

Dielectric films for capacitors mfr., used in thin film techniques, esp. for condensers in thin film circuits, comprises anodic oxidn. of a thin Ta film on an insulating substrate plate, using an electroly with a high purity, consisting of an NH3 soln. in twice-distd. water with a specific conductivity of 80-200 mu S/cm. Flawless Ta2O5 films are obtd. The condensers obtd. have a specific insulation resistance of over 1014-1015 ohm. cm at 1/6 of the forming voltage, corresp. to an insulation resistance of over 10+9 ohm, and a surface capacity of ca. 0.2 muF/cm2.