首页> 外国专利> Spherical luminescence diode prodn. using selective epitaxy - uses mask exposing locations for producing notches in substrate

Spherical luminescence diode prodn. using selective epitaxy - uses mask exposing locations for producing notches in substrate

机译:球形发光二极管产品使用选择性外延-使用掩膜曝光位置在基板上产生缺口

摘要

The production process of hemispherical luminescence diodes starts with an even number of discs of a semi-conductive, intermetallic compound substrate, heavily doped by a material forming in the substrate a first conductivity. The polished surfaces of the discs are provided with a passivating coating, having mask apertures for selective epitaxy. Thus first flat depressions are formed under the mask apertures on the main surfaces, into which is epitaxially grown substrate material with amphoterically doped pn-junction at temperatures of approximately 800 deg.C. This substrate material is then contacted and the mask apertures are also surrounded by annular contacts, provided with soldering layers. Finally cubes are cut out from the substrate, each containing a pair of diodes and ground into spherical shape.
机译:半球形发光二极管的生产过程从偶数个半导电金属间化合物衬底的圆盘开始,该衬底由在衬底中形成第一导电性的材料重掺杂。圆盘的抛光表面设有钝化涂层,该钝化涂层具有用于选择性外延的掩模孔。因此,在主表面上的掩模孔下方形成第一平坦凹陷,其中在大约800℃的温度下外延生长具有两性掺杂的pn结的衬底材料。然后接触该衬底材料,并且掩模孔也被设置有焊接层的环形触点包围。最后,从基板上切出立方体,每个立方体都包含一对二极管,并研磨成球形。

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