Corpuscular beam microscope, particularly electron microscope, with adjusting means for changing the position of the object to be imaged or the image of the object

摘要

The determination and correction of the image drift in an electron microscope is accomplished using a correction signal obtained by forming the convolution product of an actual object image (instantaneous microscope image) and a reference object image (microscope image at an earlier point in time) whose change in position is proportional to the image drift. The convolution product preferably is formed using an optical analog computer. To correct the image drift, the correlation signal is used as the controlled variable which acts on the image adjusting means.