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Charge coupled device including a slow-wave structure for providing charge transfer
Charge coupled device including a slow-wave structure for providing charge transfer
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机译:包括用于提供电荷转移的慢波结构的电荷耦合器件
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摘要
A charge coupled device (CCD) wherein clocking or charge transfer at relatively high frequencies is obtained by the use of a slow- wave structure in the form of a metallized meander line fabricated on a relatively thin region of silicon dioxide contiguously formed on the surface of a silicon semiconductor substrate.
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