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PREPARATION OF INTERRLAYER INSULATION FILM UTILIZED IN MULTIILAYER WIR ING OF ELECTRONIC PARTS
PREPARATION OF INTERRLAYER INSULATION FILM UTILIZED IN MULTIILAYER WIR ING OF ELECTRONIC PARTS
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机译:电子零件多层布线中的层间绝缘膜的制备
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摘要
PURPOSE:To obtain an inter-layer insulation film free from contamination, humidity and corrision utilized in an IC etc. by providing Si3N4 films on the upper and lower side of a glass insulation film such as silicate glass.
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