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Superconducting molybdenum or molybdenum alloy film prodn. - by coating substrate with molybdenum sulphide and treating with metal and halogen vapour
Superconducting molybdenum or molybdenum alloy film prodn. - by coating substrate with molybdenum sulphide and treating with metal and halogen vapour
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机译:超导钼或钼合金薄膜产品-通过用硫化钼涂覆基底并用金属和卤素蒸气处理
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摘要
Prodn. of superconducting Mo (alloy) films on substrates coated with Mo involves first coating the substrate with sulphides, e.g. MoS2, Mo1-xMxS2 or treating at over 600 degrees C with a gas mixt. of S and/or Se, their halides and diluents e.g. Ar, N2 and/or H2, and then treating at 1000-1200 degrees C with a gas mixt. of perhalides and/or halogens and Mo, Pb, Sn, lanthanides, A-metals and/or their alloys. The process is suitable for the continuous prodn. of films on wires, rods, ribbons and sheets. Pref. coating takes place continuously and the gas used contains 85-99 vol.% diluent and is at a total press. of 0.5-2 atmos. Coating with MoS2 or Mo1-xMxS2 (in which M is Nb, Ta, Ti, Zr, Hf, V, Cr, W. May be carried out by sputtering, evapn. or deposition from a reactive gas phase.
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