GAS LOADING CLASSES AND LABELLING SCHEME FOR LESIN INFORMATION INVOLVING A SAD GAS LOADING CLASS

摘要

In a gas discharge laser, a radiation-attenuating film, preferably a metal film, is incorporated in the multilayer coupling-out mirror near the substrate thereof between the layers. As a result the laser becomes less sensitive to light reflected towards the mirror form external surfaces so that fewer fluctuations in the intensity of the laser beam occur and reflection of said light from the substrate side is considerably reduced.