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Pipe for diffusion processes in the field of semiconductor technology, is made from polycrystalline silicon
Pipe for diffusion processes in the field of semiconductor technology, is made from polycrystalline silicon
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机译:半导体技术领域中用于扩散工艺的管道由多晶硅制成
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摘要
A method for establishing electrical contacts on a tubular furnace of polycrystalline silicon for direct heating, used in diffusion processes for semi-conductor prodn., using a tube deposited from the gaseous phase on a support, comprises providing at least a partial layer of highly-doped silicon, and compressing the two extremities of the tube between at least two graphite clamps surrounded by a conductive metal. the arrangement assures good high temp. constancy, and uniform temp. throughout a large part of the tube.
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