A composite electron microscope grid for support of specimens and suitable for energy dispersive X-ray analysis is fabricated from a low atomic number composite material comprising a polymer formed from a combination of some or all of carbon, hydrogen, oxygen and nitrogen, to which carbon, preferably in the form of carbon fibers is blended. The dispersed carbon in the polymer strengthens the grid and greatly increases the electrical and thermal conductivity of the resultant grid so as to minimize the otherwise present electron charge buildup in the vicinity of the grid during the electron bombardment associated with the X-ray analysis. The high thermal conductivity of the grid minimizes the temperature rise in the grid and specimen under analysis; thereby ensuring a stable specimen image.PPThe composite grids according to the present invention are fabricated from an etched surfaced mold which is sacrificed after the grid casting. Preferably, the mold is made from a material with a different solubility or chemical resistance than the composite material forming the grid so that the mold can simply be dissolved after use. The mold itself is preferably etched using a photoresistive process for precisely etching the desired grid structure into the mold material. The mold process for making the grid can be utilized for molding other types of micro-components.
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