PURPOSE:Bis(trialkylsilyl) 1-trialkylsilyloxy-2-haloalkylphosphonates of formula I(R' isH, 1-10C alkyl or 1-10C aralkyl R' may be different from each other; R'' is H or 1-10C alkyl; R''' is 1-4C alkyl, R''' may be different from each other;X is halogen), e.g. bis(trimethylsilyl)-1-trimethylsilyloxy-2chloropropylphosphonate.
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