Ellipsometric method and ellipsometric device for testing the physical properties of the surface of a sample

摘要

Method and apparatus for investigating the physical properties of the surface of a sample, for example, the reflection behavior or a or a on a surface (7) existing layer or film, such as its thickness or refractive index with the aid of electromagnetic radiation, wherein the radiation at the examined sample surface and also having at a known Oberffächeneigenschaften reference surface (6) is contacted with the same angle of incidence as at the sample surface to reflect, in the manner that on the reflected to the incident plane a reflective surface parallel polarization component or direction of this surface radiation is perpendicular to the plane of incidence at the other reflection surface and the radiation component having the same polarization state as before the first reflection at one of the two surfaces through the analyzer (8) is cleared.