Error correction for precision machinery position measurement devices - using inclined graduations and scanner motion correction coupling

摘要

The error correction device for precision machine position measurement equipment enables the compensation of machine and for graduation errors without the need for a separate error correction profile. The centre line (M) of the graduation, which lies in the longitudinal direction of the graduated body (3), is inclined w.r.t. the measurement direction (X) of the relatively movable bodies (2,8) at least in sections. The relative motion of the graduation scanner (5) w.r.t. the graduated body (3) takes place parallel to the graduation centre line. The graduation scanner (5) is connected to its holder (9) via coupling elements (11,12) which correct the relative motion between the scanner and the graduated body in the longitudinal direction. The graduation centre line may be inclined to the measurement direction over the entire measurement length by a constant small angle (beta).