PLASMA PASSIVATION TECHNIQUE TO PREVENT CORROSION AFTER ATTACK OF PLASMA-ATTACKED ALUMINUM FILMS

摘要

The invention relates to a method for preventing the corrosion after attack of aluminum foils or aluminum alloys attacked by plasmas. After the attack by a fl uorescent plasma, the FILM HAVING FLUORINATED PLASMA THAT PRODUCES PASSIVATION. / P P APPLICATION TO THE PRODUCTION OF SEMICONDUCTOR DEVICES. / P