USE OF A CONDUCTIVE ORGANIC CHARGE TRANSFER MATERIAL AS ELECTRON BEAM SENSITIVE RESIST COMPOSITION, AND METHOD OF FORMING POSITIVE AND NEGATIVE RESIST IMAGES

摘要

1. Use of a conducting organic charge transfer material selected from the group consisting of chlorines, bromines, and iodines of the tetraheterofulvalenes of the general formula see diagramm : EP0023988,P8,F1 where X is S and/or Se and R = H, alkyl or both adjacent residues represent R hexamethylene ; of the tetraheterotracenes of the general formula see diagramm : EP0023988,P8,F2 where X is S and/or Se ; of the tetraheteronaphtalenes of the general formula see diagramm : EP0023988,P9,F1 where X is S and/or Se ; of the perylene ; of the diheterodipyrans of the general formula see diagramm : EP0023988,P9,F2 where X is S and/or Se or N-alkyl and R = alkyl or phenyl ; of the tetramethylphenylenediamine ; of the phthylocyanines and porphyrines ; where the stoichiometric ratio of the charge transfer salt is less than 1, as an electron-beam sensitive resist material.