Liq. phase epitaxy device - has separate melt containers and three-part substrate holder

摘要

Device has for each melt a separate container in a common base element. A two-part substrate holder forms a cavity with grooves to suit the substrates. The outside dimensions suit the sizes of the melt containers. The base element has two containers for two defferent melts. The substrates are retained in a holder with an upper part and two sides with grooves. Elongated holes and screws facilitate the adjustment. A slot allows the melt to run in. A cover has a bore for the substrate holder rod. ADVANTAGE - This facilitates the compensation for varying sizes of substrates and the operation with several melts.