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Method for determining oxygen content in semiconductor material
Method for determining oxygen content in semiconductor material
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机译:测定半导体材料中氧含量的方法
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摘要
The content of oxygen, if any, that is present in a body of essentially monocrystalline semiconductor material is determined by converting by heating all of the oxygen in the body to interstitial form. The oxygen content is measured by infrared beam evaluation of the absorption band to identify the interstitial oxygen present in the material.
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