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Apparatus for glow discharge deposition of a thin film
Apparatus for glow discharge deposition of a thin film
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机译:用于薄膜的辉光放电沉积的设备
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摘要
A thin amorphous film-forming apparatus comprising a plurality of discharge unit chambers connected in a loop, each provided with a glow discharge generating means and a space for storing a substrate, gas supply and discharge valves are provided between the unit chambers, and means for periodically changing the opening and closing of the valves.
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