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Spectrometer objective having parallel objective fields and spectrometer fields for the potential measuring technique
Spectrometer objective having parallel objective fields and spectrometer fields for the potential measuring technique
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机译:具有平行物镜场的光谱仪物镜和用于电势测量技术的光谱仪场
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摘要
An apparatus for the potential measuring technique has an objective lens for focusing primary electrons onto an object, and also has a spectrometer for the energy selection of secondary electrons to provide an improvement of the quantitative potential measurement on printed conductors of integrated microelectronic components with improved local resolution, higher probe current, and improved potential resolution. The objective lens is a magnetic lens in which the lens field lies largely outside the lens body, and the spectrometer is an electrostatic retarding field spectrometer arranged in the magnetic field of the lens.
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