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Spectrometer objective with parallel objective and spectrometer fields for use in the potential measuring technique
Spectrometer objective with parallel objective and spectrometer fields for use in the potential measuring technique
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机译:具有平行物镜和光谱仪场的光谱仪物镜,用于电势测量技术
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摘要
An apparatus for the potential measuring technique has an objective lens for focusing primary electrons onto an object, and also has a spectrometer for the energy selection of secondary electrons to provide an improvement of the quantitative potential measurement on printed conductors of integrated microelectronic components with improved local resolution, higher probe current, and improved potential resolution. The objective lens is a magnetic lens in which the lens field lies largely outside the lens body, and the spectrometer is an electrostatic retarding field spectrometer arranged in the magnetic field of the lens.
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