COMPOSITE BODY CONSISTING OF TI METALLIC LAYER AND BA1-XSRXTIO3 FILM AND ITS PRODUCTION

摘要

PURPOSE:To provide a dielectric material for a capacitor having a large dielectric constant by subjecting a Ti metal to a chemical conversion treatment in an aq. strong alkaline soln. contg. Ba2+ and Sr2+ and forming a specifically composed Ba-Sr-Ti oxide layer on the surface. CONSTITUTION:An Au layer 2 is formed by a vapor deposition method, etc. on a substrate 1 made of ceramics, glass, etc. and is then etched partially by utilizing a photoresist mask. The Ti metallic layer 3 is formed by a vapor deposition method, etc. thereon and the layer 3 except the layer 2 is etched away. The substrate is dipped in the aq. strong alkaline soln. prepd. by dissolving Ba(OH)2. 8H2O, Sr(OH)2.8H2O and contg. =0.1mol/l Ba2+ and =0.1mol/l Sr2+ to convert chemically the whole of the layer 3 to a Ba1-xSrxTiO3 (where 0x1) layer 4 thereby forming the dielectric material having the high dielectric constant. An Au electrode 5 which is a counter electrode is attached thereon and the capacity having the extremely high dielectric constant is manufactured.