GAS CHROMATOGRAPH MASS SPECTROMETER FOR MEASURING TRACE COMPONENT IN HIGHLY PURE GAS

摘要

PURPOSE:To remove effect of a main component gas on the subsequent gas, by discharging a main component gas retained in a first column outside the system while introducing a trace component gas fed to a second column into an analyzer after separated according to holding time of each component. CONSTITUTION:A changeover valve 1 is operated to introduce a measuring gas into a first column 2 together with a carrier gas from a gas introduction port 10 and a trace component gas is introduced into a column 4A of the second column 4 while the main component gas is retained. When passing through the trace component gas column 2 completely, the main component gas is discharged into a filter 11 by the carrier gas by switching a changeover valve 3. moreover, inorganic gas and hydrocarbon in the trace gas are separated according to holding time thereof to be fed to the column 4B, from which they are sent to a separator 5 sequentially. Then, after the removal of the carrier gas with the separator 5, these components are sent to a mass analyzer 6.