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PRODUCTION OF METAL-CERAMIC LAMINATE MATERIAL DEPOSITED WITH BORON NITRIDE ON SURFACE OF MOBN FILM
PRODUCTION OF METAL-CERAMIC LAMINATE MATERIAL DEPOSITED WITH BORON NITRIDE ON SURFACE OF MOBN FILM
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机译:钼膜表面氮化硼沉积金属陶瓷层积材料的生产
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摘要
PURPOSE:To easily produce a metal-ceramic laminate material having excellent adhesiveness by forming a specifically composed MoBN film on a substrate by a high-frequency sputtering method then heating the substrate to an adequate temp. in a vacuum to deposit BN on the surface. CONSTITUTION:The MoBN film which is expressed by the general formula Mo100-(x+y)BxNy (where x0, y0, x+y100, more preferably about 5.8=x+y=40) and contains B and N at a high concn. is formed on the substrate by a high-frequency sputtering method using Mo and BN as a target in a gaseous Ar atmosphere. Such substrate is heated to a relatively low temp. of 500-1,000 deg.C in a vacuum to deposit B and N which are the ceramic components on the surface, by which the uniform BN ceramic film having good adhesiveness and the metal-ceramic laminated material is obtd.
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机译:用途:为了通过使用高频溅射方法在基板上形成特定组成的MoBN膜,然后将基板加热到适当的温度,来轻松生产具有优异粘合性的金属陶瓷层压材料。在真空中将BN沉积在表面上。组成:用通式Mo100-(x + y)BxNy(其中x> 0,y> 0,x + y <100,更优选约5.8 <= x + y <= 40)表示的MoBN膜,以高浓度包含B和N。在气态Ar气氛中,通过使用Mo和BN作为靶,通过高频溅射法在衬底上形成Al 2 O 3。这样的基板被加热到相对较低的温度。在真空中500-1000℃下沉积B和N,它们是陶瓷组分,在表面上沉积,由此获得具有良好粘合性的均匀BN陶瓷膜和金属-陶瓷层压材料。
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