PRODUCTION OF METAL-CERAMIC LAMINATE MATERIAL DEPOSITED WITH BORON NITRIDE ON SURFACE OF MOBN FILM

摘要

PURPOSE:To easily produce a metal-ceramic laminate material having excellent adhesiveness by forming a specifically composed MoBN film on a substrate by a high-frequency sputtering method then heating the substrate to an adequate temp. in a vacuum to deposit BN on the surface. CONSTITUTION:The MoBN film which is expressed by the general formula Mo100-(x+y)BxNy (where x0, y0, x+y100, more preferably about 5.8=x+y=40) and contains B and N at a high concn. is formed on the substrate by a high-frequency sputtering method using Mo and BN as a target in a gaseous Ar atmosphere. Such substrate is heated to a relatively low temp. of 500-1,000 deg.C in a vacuum to deposit B and N which are the ceramic components on the surface, by which the uniform BN ceramic film having good adhesiveness and the metal-ceramic laminated material is obtd.