PRODUCTION OF ULTRAFINE METALLIC PARTICLE COATED WITH PLASMA POLYMERIZED FILM

摘要

PURPOSE:To produce ultrafine metallic particles coated with a plasma polymerized film of an org. material by evaporating a metal in an inert gaseous or low-pressure gaseous oxygen atm. and subjecting simultaneously the same to low-temp. plasma polymn. by glow discharge in a low-pressure gaseous mixture added with the vapor of a specific org. compd. CONSTITUTION:The metal such as Zn, Cd, Al, Fe, Ni, Co, Cu, Ag or Au is put into a basket type heater made of a W wire in a reaction vessel and after the inside of the vessel is evacuated, the gaseous mixture composed of the vapor of 1 kind among the org. compd. such as benzene, styrene, pyridine, picoline or acrylnitrile and an inert gas such as Ar, He or N2 of low-pressure gaseous O2 of about 1.0Torr is introduced into the vessel. The above-mentioned metal is heated and evaporated in the low-pressure atmosphere of such gaseous mixture under 1.0-3.0Torr and at the same time the low-temp. plasma is generated by the high-frequency electroless glow discharge, by which the fine metallic particles coated with the extremely thin plasma polymerized film are produced.