MANUFACTURE OF CO-O THIN FILM TYPE VERTICAL MAGNETIC RECORDING MEDIUM

摘要

PURPOSE:To obtain a magnetic film of excellent and stabilized quality while a chamber is maintained in an oxygen atmosphere of high degree of vacuum by a method wherein oxygen gas is inoized in the space partitioned from the chamber containing a source of evaporation and an electron gun with which the source of evaporation is heated up and eveporated, and said inoized oxygen gas is made to irradiate on a substrate. CONSTITUTION:The cobalt vapor emitted from a source of evaporation is made incident on a substrate 2 almost vertically. At this time, the interior of a chamber 6 containing the source of evaporation 1 and an electronic gun 3 is not brought into a low vacuum state, but it is maintained in a high vacuum state of 10-4Torr or above which is suitable for emission of an electron beam from the electron gun 5. Oxygen gas is introduced into a cell 7, it is ionized by the impact of the thermion emitted from a filament 8, and the ion is made to irradiate on a substrate 2 by the accelerating voltage impressed between the filament 8 and the substrate 2. Through these procedures, the vapor of cobalt emittef from the source of evaporation 1 is reacted with the oxygen ions emitted from the ion gas 3 and deposited to the subsrate 2, thereby enabling to form a Co-O vertical magnetic film.