MANUFACTURING METHOD OF SOFT MAGNETIC THIN FILM, SAME SOFT MAGNETIC THIN FILM, MAGNETIC HEAD, AND VERTICAL MAGNETIC RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a soft magnetic thin film, the soft magnetic thin film itself, a magnetic head, and a vertical magnetic recording medium wherein its characteristics of a saturated magnetic flux density B_s not smaller than 24.5 kG and an anisotropic magnetic field H_k not smaller than 15.50e can be realized even when adding no third element to it.;SOLUTION: The manufacturing method of the soft magnetic thin film includes a backing film manufacturing step for film-manufacturing a non-magnetic backing film 12 on a non-magnetic substrate 11 and a magnetic film manufacturing step for film-manufacturing an Fe-Co magnetic film 13 on the non-magnetic backing film 12. Hereupon, the magnetic film manufacturing step includes an ion-irradiation-based film manufacturing step for film-manufacturing the Fe-Co magnetic film 13 while irradiating an assist-ion beam IBa on the non-magnetic backing film 12 and a heat treating step for heat-treating the Fe-Co magnetic film 13 after ion-irradiation-based film manufacturing while applying a magnetic field to it.;COPYRIGHT: (C)2008,JPO&INPIT