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METHOD FOR MANUFACTURING A ISFET AND THUS MANUFACTURED ISFET.
METHOD FOR MANUFACTURING A ISFET AND THUS MANUFACTURED ISFET.
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机译:制造ISFET的方法及其制造的ISFET。
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PCT No. PCT/NL85/00013 Sec. 371 Date Nov. 19, 1985 Sec. 102(e) Date Nov. 19, 1985 PCT Filed Mar. 22, 1985 PCT Pub. No. WO85/04480 PCT Pub. Date Oct. 10, 1985.A process for modifying an oxide surface of a semi-conductor material, for example included in an ISFET, wherein a coating of a polymer is applied to the oxide surface. The polymer is chemically bonded to the oxide surface. Optionally a second coating can comprise metal ion complexing groups. The process can be used for manufacturing an ISFET.
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