A METHOD OF MAKING AN IMPROVED PHOTORESPONSIVE SILICON-BASED ALLOY

摘要

A semiconductor material comprises amorphous Si containing F (a- Si: F) together with a band gap increasing modifier (e.g. C or N). H may also be incorporated in the material which may be doped. The material may be used in Schottky, MIS and PIN solar cells or in photoconductive or electrophotographic devices.