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Devicefor generating negative-ion beams by alkaline metal ion sputtering
Devicefor generating negative-ion beams by alkaline metal ion sputtering
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机译:通过碱金属离子溅射产生负离子束的装置
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摘要
A negative-ion source comprising means for discharging alkaline metal for discharging neutral alkaline metal particles together with alkaline metal ion particles; an electrode for generating negative ions which can serve as an extraction electrode for extracting said alkaline metal ion particles and a target bombarded with said alkaline metal ion particles and which provides with a hold for holding negative- ion seed material in the portion bombarded with said alkaline metal ion particles and an aperture for letting out negative-ion particles; and a negative-ion extraction electrode for said negative-ion particles. The present negative-ion source has an improved ion current efficiency and is compact size.
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