PURPOSE:To prevent the break-through by moisture and to make usable an adsorbent for a long period of time by disposing a specific adsorption section, detection section and water adsorption section to a boron trichloride adsorption device. CONSTITUTION:The boron trichloride adsorption section 4 in which the adsorbent 3 (e.g.; active carbon) is packed is provided into a vessel having a gas introducing port 1 and discharge port 2. The detection section 5 is disposed in series thereto in proximity to the port 2. A detecting agent consisting of 1,1'-cyan trimide and sulfuric acid is packed into the detection section 5. The water adsorption section 6 consisting of synthetic zeolite is disposed into a laminar state on the adsorbent 3. The synthetic zeolite has 2-10Angstrom small pore size and has the effect of a molecular sieve to selectively capture the moisture in the gas passed through the adsorbent 3. The break-through of the boron trichloride is effectively detected without being disturbed by the moisture when the gas contg. the boron trichloride is introduced into the device in the above- mentioned constitution.
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