VERTICAL TYPE VAPOR GROWTH EQUIPMENT FOR ORGANIC METAL THERMAL DECOMPOSITION METHOD

摘要

PURPOSE:To prevent the adherence of particulate dust to the surface of crystal substrate, and realize crystal growth of high quality, by providing a part member capable of transferring vertically above the crystal substrate arranged in a growth chamber. CONSTITUTION:Above a crystal substrate 2, a part member 6 is installed, which is capable of transferring vertically and has an area larger than the substrate 2. While the inside of a growth chamber is vaccumized, hydrogen gas is introduced, and temperature is raised, the part member 6 is transferred downward to cover the substrate 2. During the period of crystal growth, the part member 6 is transferred upward and is put close to an introducing inlet 12 of material gas to make the member function as a diffusion plate. The adherence of particulate dust to the surface of the substrate 2 is prevented, and crystal growth of high quality is realized, thereby.