Process and apparatus for creating a chemically active environment for plasmochemical reactions, principally for separating off thin layers

摘要

The invention relates to possible methods of creating a directable and localisable zone of an activated gas directly in the region of a plasma. According to the invention, an activatable reaction gas or a mixture with at least one working gas is introduced into a vacuum system through a nozzle in the direction of the highest chemical activity required of the active zone forming in the region of the plasma generation at a pressure which is higher than the pressure of the circulating working gas. In this case, a significant part of the activatable gas is converted into a chemically active state in the activated zone of the flowing activatable reaction gas. One embodiment of the apparatus according to the invention is provided, in a vacuum chamber (7), with both a first electrode (6), which simultaneously forms a nozzle (2) through which the activatable gas (1) is passed, and a second electrode (8), which is arranged, as is the first electrode (6), in the region of the plasma generation, a solid substrate (9) being movably mounted between both electrodes (6, 8) in the range of the activated zone (5). The working gas (3) is introduced into the vacuum chamber (7) through a feed line. Both electrodes are connected to a power source (13). In the case of the second alternative, the essence of the invention, in the case of so-called electrodeless plasma generation, is based on the fact that the vacuum chamber (7) equipped with a so-called coupling element (14)... Original abstract incomplete. IMAGE