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Dielectric insulation type semiconductor integrated circuit having low withstand voltage devices and high withstand voltage devices
Dielectric insulation type semiconductor integrated circuit having low withstand voltage devices and high withstand voltage devices
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机译:具有低耐压器件和高耐压器件的介电绝缘型半导体集成电路
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摘要
At the bottom of an island region in which a low withstand voltage transistor is formed, is provided a high concentration region of the same conductivity type as the island region having a larger thickness than a high concentration region provided at the bottom of an island region in which a high withstand voltage transistor is formed, and the bottom surfaces and side surfaces of the respective island regions are fixedly secured to a polycrystalline semiconductor layer via insulator films.
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