NEUTRALISED LOW ENERGY ION BEAM GENERATOR, METHOD OF PRODUCING A NEUTRALISED LOW ENERGY ION BEAM AND METHOD OF PRODUCING A NEUTRALISED HIGH ENERGY ION BEAM

摘要

A neutralised low energy ion beam is produced by forming a plasma between an anode (13) and a cathode (14) and maintaining a grid (16) at a potential slightly more positive than the cathode (14) so that a beam containing positive ions and high energy primary electrons from the plasma passes through the grid (16). …??A neutralised high energy ion beam is produced by directing a low energy beam containing charged particles of opposite polarity to that of the ions in an unneutralised high energy ion beam across the latter beam. The low energy beam may be one produced by a generator as described above or another ion source and an electron source (21).