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Induction heating coil for the floating zone pulling of crystal rods
Induction heating coil for the floating zone pulling of crystal rods
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机译:感应加热线圈,用于拉动晶体棒的浮动区域
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摘要
An induction heating coil for a zone pulling of semiconductor rods assures the disturbance-free performance of the pulling process even at the high power densities required for large rod diameters (approximately 10 to 12 cm). According to the invention, the arc-over paths between surfaces in the region of the coil slot, which are at differing potentials, are covered by one or more movable planar structures of temperature-stable insulating material which are introduced into the coil slot.
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