APPARATUS AND METHOD FOR MANUFACTURING LARGE-AREA ELECTRONIC DEVICE SUCH AS FLAT PANEL TYPE DISPLAY USING ALIGNED DUAL OPTICAL SYSTEM WITH CORRELATIONSHIP

摘要

PURPOSE: To correct an error in orthogonality by generating a single composite image on a photosensitive surface by positioning projection images mutually and relatively correctly by using the aligned dual optical systems having the correlation. CONSTITUTION: Two images are projected on a single glass substrate at the same time by using a couple of parallel nearby optical columns 90 (camera system). The images of those two cameras 29 are correctly positioned to have the same size, shape, and direction, and they are correctly connected and enlarged to form the composite image which is uniform. Namely, a reticle (master- object) is held by a special 6-degree-of-freedom chuck 230. Then the magnification, trapezoidal error, X and Y positions, and rotation of the projected images are adjusted by the movement of the chuck 130. The X directions are adjusted to precisely measure the distance between the images of the two cameras 29. Consequently, a vertical error can be corrected.