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SCHOTTKY BARRIER TYPE INFRARED DETECTOR

机译:肖特基势垒型红外探测器

摘要

PURPOSE:To eliminate or soften anisotropy of a directional distribution of reflected infrared rays and reduce exceedingly the intensity of infrared rays which come to other detecting element after being reflected, by making the form of reflecting surface of an infrared reflection member elliptical such as circular or oval and the like. CONSTITUTION:A detector 1a is equipped with a circular reflecting surface of an infrared reflecting member 8a. The directional distribution of reflected infrared rays has an axial symmetry and does not indicate anisotropy in conformity with a Fraunhofer's diffraction phenomenon. Further, even though a part of infrared rays which are reflected by the infrared reflecting member 8a belonging to a certain detecting element 2a, penetrates a layer of a metallic silicide 6, the feature of this reflection member serves the purpose of relieving the intensity of the above infrared rays which come to other detecting element 2a by receiving residual reflection at a plane which is treated with antireflection coating 4 of a P-type silicon substrate 5.
机译:目的:通过使红外反射部件的反射表面呈椭圆形(例如圆形或椭圆形),消除或减弱反射的红外线的方向分布的各向异性,并极大地降低反射后到达其他检测元件的红外线的强度。椭圆形之类的。组成:探测器1a配备有红外反射元件8a的圆形反射面。反射的红外线的方向分布具有轴向对称性,并且不表示与弗劳恩霍夫衍射现象一致的各向异性。此外,即使被属于某个检测元件2a的红外线反射部件8a反射的一部分红外线穿透了金属硅化物6的层,该反射部件的特征还在于减轻其强度。通过在由P型硅衬底5的抗反射涂层4处理过的平面上接收残留反射,使红外线到达其他检测元件2a。

著录项

  • 公开/公告号JPH01112781A

    专利类型

  • 公开/公告日1989-05-01

    原文格式PDF

  • 申请/专利权人 MITSUBISHI ELECTRIC CORP;

    申请/专利号JP19870270992

  • 发明设计人 ENDO TAISUKE;SAEKI RIICHI;ITO TAKASHI;

    申请日1987-10-27

  • 分类号G01J1/02;H01L27/14;H01L31/10;H01L31/108;H04N5/33;

  • 国家 JP

  • 入库时间 2022-08-22 06:46:13

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