Analysis of organic additives in plating paths using novel chromatographic methods in a mass balance approach

摘要

An accurate repeatable quantitative determination of the concentration of organic additives, additive breakdown products and organic contaminants in plating baths can be made using a novel high-pressure liquid chromatography apparatus in combination with size exclusion chromatography and total organic carbon analysis. The apparatus comprises (a) a chromatographic column containing a stationary phase and a support phase composition, having an inlet and an outlet; (b) a detector means for measuring the relative concentration of organic constituents, having an inlet and an outlet wherein the chromatographic column outlet is attached in liquid communication to the detector inlet; (c) a second column having a packing comprising at least a stationary phase composition and an inlet and an outlet wherein the second column outlet is connected in liquid communication with the chromatographic column inlet wherein the second column stationary phase composition can substantially reduce the affect of the acidic or basic components of the sample on the reproducibility, precision or accuracy of the analysis; (d) a sample introduction means having an inlet, an outlet and a sample introduction port, wherein the sample introduction means outlet is attached in liquid communication to the second column inlet; and (e) a source of solvent under pressure attached in liquid communication to the sample introduction means inlet.